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Statistical study of the influence of LER and MGG in SOI MOSFET

G Indalecio, M Aldegunde, N Seoane, K Kalna, A J García-Loureiro, Karol Kalna Orcid Logo

Semiconductor Science and Technology, Volume: 29, Issue: 4, Start page: 045005

Swansea University Author: Karol Kalna Orcid Logo

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DOI (Published version): 10.1088/0268-1242/29/4/045005

Published in: Semiconductor Science and Technology
Published: 2014
URI: https://cronfa.swan.ac.uk/Record/cronfa21851
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College: College of Engineering
Issue: 4
Start Page: 045005