No Cover Image

Journal article 282 views

Fullerene-based spin-on-carbon hardmask

A. Frommhold, J. Manyam, R.E. Palmer, A.P.G. Robinson, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 98, Pages: 552 - 555

Swansea University Author: Richard Palmer Orcid Logo

Full text not available from this repository: check for access using links below.

Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2012
Online Access: Check full text

URI: https://cronfa.swan.ac.uk/Record/cronfa49285
Tags: Add Tag
No Tags, Be the first to tag this record!
College: College of Engineering
Start Page: 552
End Page: 555