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Fullerene-based spin-on-carbon hardmask

A. Frommhold, J. Manyam, R.E. Palmer, A.P.G. Robinson, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 98, Pages: 552 - 555

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2012
Online Access: Check full text

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College: Faculty of Science and Engineering
Start Page: 552
End Page: 555