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Fullerene-based spin-on-carbon hardmask

A. Frommhold, J. Manyam, R.E. Palmer, A.P.G. Robinson, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 98, Pages: 552 - 555

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1016/j.mee.2012.07.019

Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2012
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URI: https://cronfa.swan.ac.uk/Record/cronfa49285
first_indexed 2019-03-18T20:01:34Z
last_indexed 2019-03-18T20:01:34Z
id cronfa49285
recordtype SURis
fullrecord <?xml version="1.0"?><rfc1807><datestamp>2019-03-18T14:30:33.1199741</datestamp><bib-version>v2</bib-version><id>49285</id><entry>2019-03-18</entry><title>Fullerene-based spin-on-carbon hardmask</title><swanseaauthors><author><sid>6ae369618efc7424d9774377536ea519</sid><ORCID>0000-0001-8728-8083</ORCID><firstname>Richard</firstname><surname>Palmer</surname><name>Richard Palmer</name><active>true</active><ethesisStudent>false</ethesisStudent></author></swanseaauthors><date>2019-03-18</date><deptcode>ACEM</deptcode><abstract/><type>Journal Article</type><journal>Microelectronic Engineering</journal><volume>98</volume><journalNumber></journalNumber><paginationStart>552</paginationStart><paginationEnd>555</paginationEnd><publisher/><placeOfPublication/><isbnPrint/><isbnElectronic/><issnPrint>01679317</issnPrint><issnElectronic/><keywords/><publishedDay>31</publishedDay><publishedMonth>12</publishedMonth><publishedYear>2012</publishedYear><publishedDate>2012-12-31</publishedDate><doi>10.1016/j.mee.2012.07.019</doi><url/><notes/><college>COLLEGE NANME</college><department>Aerospace, Civil, Electrical, and Mechanical Engineering</department><CollegeCode>COLLEGE CODE</CollegeCode><DepartmentCode>ACEM</DepartmentCode><institution>Swansea University</institution><apcterm/><lastEdited>2019-03-18T14:30:33.1199741</lastEdited><Created>2019-03-18T14:30:32.9052737</Created><path><level id="1">Faculty of Science and Engineering</level><level id="2">School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering</level></path><authors><author><firstname>A.</firstname><surname>Frommhold</surname><order>1</order></author><author><firstname>J.</firstname><surname>Manyam</surname><order>2</order></author><author><firstname>R.E.</firstname><surname>Palmer</surname><order>3</order></author><author><firstname>A.P.G.</firstname><surname>Robinson</surname><order>4</order></author><author><firstname>Richard</firstname><surname>Palmer</surname><orcid>0000-0001-8728-8083</orcid><order>5</order></author></authors><documents/><OutputDurs/></rfc1807>
spelling 2019-03-18T14:30:33.1199741 v2 49285 2019-03-18 Fullerene-based spin-on-carbon hardmask 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Microelectronic Engineering 98 552 555 01679317 31 12 2012 2012-12-31 10.1016/j.mee.2012.07.019 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:30:33.1199741 2019-03-18T14:30:32.9052737 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering A. Frommhold 1 J. Manyam 2 R.E. Palmer 3 A.P.G. Robinson 4 Richard Palmer 0000-0001-8728-8083 5
title Fullerene-based spin-on-carbon hardmask
spellingShingle Fullerene-based spin-on-carbon hardmask
Richard Palmer
title_short Fullerene-based spin-on-carbon hardmask
title_full Fullerene-based spin-on-carbon hardmask
title_fullStr Fullerene-based spin-on-carbon hardmask
title_full_unstemmed Fullerene-based spin-on-carbon hardmask
title_sort Fullerene-based spin-on-carbon hardmask
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 A. Frommhold
J. Manyam
R.E. Palmer
A.P.G. Robinson
Richard Palmer
format Journal article
container_title Microelectronic Engineering
container_volume 98
container_start_page 552
publishDate 2012
institution Swansea University
issn 01679317
doi_str_mv 10.1016/j.mee.2012.07.019
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2012-12-31T05:49:14Z
_version_ 1850736802092023808
score 11.08895

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