Journal article 570 views
High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask
Ying Zhang,
A. Frommhold,
J. Manyam,
R. E. Palmer,
A. P. G. Robinson,
Richard Palmer 
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1117/12.916426
Abstract
High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask
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2012
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49286 |
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2019-03-18T20:01:34Z |
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2019-03-18T20:01:34Z |
| id |
cronfa49286 |
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SURis |
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2019-03-18T14:30:34.7970556 v2 49286 2019-03-18 High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article 31 12 2012 2012-12-31 10.1117/12.916426 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:30:34.7970556 2019-03-18T14:30:34.5735061 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Ying Zhang 1 A. Frommhold 2 J. Manyam 3 R. E. Palmer 4 A. P. G. Robinson 5 Richard Palmer 0000-0001-8728-8083 6 |
| title |
High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask |
| spellingShingle |
High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask Richard Palmer |
| title_short |
High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask |
| title_full |
High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask |
| title_fullStr |
High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask |
| title_full_unstemmed |
High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask |
| title_sort |
High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask |
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6ae369618efc7424d9774377536ea519 |
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6ae369618efc7424d9774377536ea519_***_Richard Palmer |
| author |
Richard Palmer |
| author2 |
Ying Zhang A. Frommhold J. Manyam R. E. Palmer A. P. G. Robinson Richard Palmer |
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Journal article |
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2012 |
| institution |
Swansea University |
| doi_str_mv |
10.1117/12.916426 |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
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2012-12-31T13:48:59Z |
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1822138344222490624 |
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11.048626 |