No Cover Image

Journal article 449 views

High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask

Ying Zhang, A. Frommhold, J. Manyam, R. E. Palmer, A. P. G. Robinson, Richard Palmer Orcid Logo

Swansea University Author: Richard Palmer Orcid Logo

Full text not available from this repository: check for access using links below.

DOI (Published version): 10.1117/12.916426

Published: 2012
URI: https://cronfa.swan.ac.uk/Record/cronfa49286
Tags: Add Tag
No Tags, Be the first to tag this record!
first_indexed 2019-03-18T20:01:34Z
last_indexed 2019-03-18T20:01:34Z
id cronfa49286
recordtype SURis
fullrecord <?xml version="1.0"?><rfc1807><datestamp>2019-03-18T14:30:34.7970556</datestamp><bib-version>v2</bib-version><id>49286</id><entry>2019-03-18</entry><title>High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask</title><swanseaauthors><author><sid>6ae369618efc7424d9774377536ea519</sid><ORCID>0000-0001-8728-8083</ORCID><firstname>Richard</firstname><surname>Palmer</surname><name>Richard Palmer</name><active>true</active><ethesisStudent>false</ethesisStudent></author></swanseaauthors><date>2019-03-18</date><deptcode>MECH</deptcode><abstract/><type>Journal Article</type><journal></journal><volume></volume><journalNumber></journalNumber><paginationStart/><paginationEnd/><publisher/><placeOfPublication/><isbnPrint/><isbnElectronic/><issnPrint/><issnElectronic/><keywords/><publishedDay>31</publishedDay><publishedMonth>12</publishedMonth><publishedYear>2012</publishedYear><publishedDate>2012-12-31</publishedDate><doi>10.1117/12.916426</doi><url/><notes/><college>COLLEGE NANME</college><department>Mechanical Engineering</department><CollegeCode>COLLEGE CODE</CollegeCode><DepartmentCode>MECH</DepartmentCode><institution>Swansea University</institution><apcterm/><lastEdited>2019-03-18T14:30:34.7970556</lastEdited><Created>2019-03-18T14:30:34.5735061</Created><path><level id="1">Faculty of Science and Engineering</level><level id="2">School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering</level></path><authors><author><firstname>Ying</firstname><surname>Zhang</surname><order>1</order></author><author><firstname>A.</firstname><surname>Frommhold</surname><order>2</order></author><author><firstname>J.</firstname><surname>Manyam</surname><order>3</order></author><author><firstname>R. E.</firstname><surname>Palmer</surname><order>4</order></author><author><firstname>A. P. G.</firstname><surname>Robinson</surname><order>5</order></author><author><firstname>Richard</firstname><surname>Palmer</surname><orcid>0000-0001-8728-8083</orcid><order>6</order></author></authors><documents/><OutputDurs/></rfc1807>
spelling 2019-03-18T14:30:34.7970556 v2 49286 2019-03-18 High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article 31 12 2012 2012-12-31 10.1117/12.916426 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:30:34.7970556 2019-03-18T14:30:34.5735061 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Ying Zhang 1 A. Frommhold 2 J. Manyam 3 R. E. Palmer 4 A. P. G. Robinson 5 Richard Palmer 0000-0001-8728-8083 6
title High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask
spellingShingle High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask
Richard Palmer
title_short High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask
title_full High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask
title_fullStr High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask
title_full_unstemmed High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask
title_sort High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Ying Zhang
A. Frommhold
J. Manyam
R. E. Palmer
A. P. G. Robinson
Richard Palmer
format Journal article
publishDate 2012
institution Swansea University
doi_str_mv 10.1117/12.916426
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2012-12-31T04:00:09Z
_version_ 1763753076933525504
score 10.997843

Similar Items