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Deep plasma etching of piezoelectric PZT with SF[sub 6]

M. Bale, R. E. Palmer, Richard Palmer Orcid Logo

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Volume: 19, Issue: 6, Start page: 2020

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1116/1.1409392

Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
ISSN: 0734211X
Published: 2001
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URI: https://cronfa.swan.ac.uk/Record/cronfa49424
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College: College of Engineering
Issue: 6
Start Page: 2020