Journal article 505 views
Fabrication of 10-nm Si pillars with self-formed etching masks
Tetsuya Tada,
Toshihiko Kanayama,
Pascal Weibel,
Simon J. Carroll,
Katrin Seeger,
Richard Palmer 
Microelectronic Engineering, Volume: 35, Issue: 1-4, Pages: 293 - 296
Swansea University Author:
Richard Palmer
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DOI (Published version): 10.1016/s0167-9317(96)00129-3
Abstract
Fabrication of 10-nm Si pillars with self-formed etching masks
| Published in: | Microelectronic Engineering |
|---|---|
| ISSN: | 01679317 |
| Published: |
1997
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| Online Access: |
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49506 |
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| id |
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| fullrecord |
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| spelling |
2019-03-18T14:38:42.0642865 v2 49506 2019-03-18 Fabrication of 10-nm Si pillars with self-formed etching masks 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Microelectronic Engineering 35 1-4 293 296 01679317 31 12 1997 1997-12-31 10.1016/s0167-9317(96)00129-3 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:38:42.0642865 2019-03-18T14:38:41.8694940 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Tetsuya Tada 1 Toshihiko Kanayama 2 Pascal Weibel 3 Simon J. Carroll 4 Katrin Seeger 5 Richard Palmer 0000-0001-8728-8083 6 |
| title |
Fabrication of 10-nm Si pillars with self-formed etching masks |
| spellingShingle |
Fabrication of 10-nm Si pillars with self-formed etching masks Richard Palmer |
| title_short |
Fabrication of 10-nm Si pillars with self-formed etching masks |
| title_full |
Fabrication of 10-nm Si pillars with self-formed etching masks |
| title_fullStr |
Fabrication of 10-nm Si pillars with self-formed etching masks |
| title_full_unstemmed |
Fabrication of 10-nm Si pillars with self-formed etching masks |
| title_sort |
Fabrication of 10-nm Si pillars with self-formed etching masks |
| author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
| author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
| author |
Richard Palmer |
| author2 |
Tetsuya Tada Toshihiko Kanayama Pascal Weibel Simon J. Carroll Katrin Seeger Richard Palmer |
| format |
Journal article |
| container_title |
Microelectronic Engineering |
| container_volume |
35 |
| container_issue |
1-4 |
| container_start_page |
293 |
| publishDate |
1997 |
| institution |
Swansea University |
| issn |
01679317 |
| doi_str_mv |
10.1016/s0167-9317(96)00129-3 |
| college_str |
Faculty of Science and Engineering |
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|
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facultyofscienceandengineering |
| hierarchy_top_title |
Faculty of Science and Engineering |
| hierarchy_parent_id |
facultyofscienceandengineering |
| hierarchy_parent_title |
Faculty of Science and Engineering |
| department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
| document_store_str |
0 |
| active_str |
0 |
| published_date |
1997-12-31T04:00:35Z |
| _version_ |
1763753103425798144 |
| score |
11.012678 |