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Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
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Saptarsi Ghosh ,
Benoit Guilhabert ,
Menno Kappers,
Alexander M. Hinz,
Miles Toon,
Rachel A. Oliver,
Martin D. Dawson ,
Michael J. Strain
Optical Materials Express, Volume: 12, Issue: 12, Start page: 4606
Swansea University Author:
Saptarsi Ghosh
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DOI (Published version): 10.1364/ome.472999
Abstract
We demonstrate the back-end integration of optically broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel process flow to fabricate and suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show th...
| Published in: | Optical Materials Express |
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| ISSN: | 2159-3930 |
| Published: |
Optica Publishing Group
2022
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa66874 |
| Abstract: |
We demonstrate the back-end integration of optically broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel process flow to fabricate and suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show their subsequent transfer-printing integration. A growth process targeted at producing unbowed epitaxial wafers was combined with optimisation of the etching volume in order to produce flat devices for printing. Lens structures were fabricated with 6 − 11 µm diameter, 2 µm height and root-mean-squared surface roughness below 2 nm. The lenses were printed in a vertically coupled geometry on a single crystalline diamond substrate and with µm-precise placement on a horizontally coupled photonic integrated circuit waveguide facet. Optical performance analysis shows that these lenses could be used to couple to diamond nitrogen vacancy centres at micron scale depths and demonstrates their potential for visible to infrared light-coupling applications. |
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| College: |
Faculty of Science and Engineering |
| Funders: |
. Royal Academy of Engineering (Research Chairs, Senior Research Fellowships); Engineering and Physical Sciences Research Council (EP/N017927/1, EP/P00945X/1, EP/R03480X/1); Innovate UK (50414); Fraunhofer Lighthouse Project Qmag; NKW acknowledges funding of his PhD studentship by Fraunhofer UK. |
| Issue: |
12 |
| Start Page: |
4606 |