Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips

Wessling, Nils Kolja; Ghosh, Saptarsi; Guilhabert, Benoit; Kappers, Menno; Hinz, Alexander M.; Toon, Miles; Oliver, Rachel A.; Dawson, Martin D.; Strain, Michael J.

doi:10.1364/ome.472999

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Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips

Nils Kolja Wessling

, Saptarsi Ghosh

, Benoit Guilhabert

, Menno Kappers, Alexander M. Hinz, Miles Toon, Rachel A. Oliver, Martin D. Dawson

, Michael J. Strain

Optical Materials Express, Volume: 12, Issue: 12, Start page: 4606

Swansea University Author: Saptarsi Ghosh

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DOI (Published version): 10.1364/ome.472999

Abstract

We demonstrate the back-end integration of optically broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel process flow to fabricate and suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show th...

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Published in:	Optical Materials Express
ISSN:	2159-3930
Published:	Optica Publishing Group 2022
Online Access:	Check full text
URI:	https://cronfa.swan.ac.uk/Record/cronfa66874

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last_indexed	2024-11-25T14:19:03Z
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spelling	2024-08-15T12:26:35.7609362 v2 66874 2024-06-23 Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips 3e247ecabd6eddd319264d066b0ce959 0000-0003-1685-6228 Saptarsi Ghosh Saptarsi Ghosh true false 2024-06-23 ACEM We demonstrate the back-end integration of optically broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel process flow to fabricate and suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show their subsequent transfer-printing integration. A growth process targeted at producing unbowed epitaxial wafers was combined with optimisation of the etching volume in order to produce flat devices for printing. Lens structures were fabricated with 6 − 11 µm diameter, 2 µm height and root-mean-squared surface roughness below 2 nm. The lenses were printed in a vertically coupled geometry on a single crystalline diamond substrate and with µm-precise placement on a horizontally coupled photonic integrated circuit waveguide facet. Optical performance analysis shows that these lenses could be used to couple to diamond nitrogen vacancy centres at micron scale depths and demonstrates their potential for visible to infrared light-coupling applications. Journal Article Optical Materials Express 12 12 4606 Optica Publishing Group 2159-3930 1 12 2022 2022-12-01 10.1364/ome.472999 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University . Royal Academy of Engineering (Research Chairs, Senior Research Fellowships); Engineering and Physical Sciences Research Council (EP/N017927/1, EP/P00945X/1, EP/R03480X/1); Innovate UK (50414); Fraunhofer Lighthouse Project Qmag; NKW acknowledges funding of his PhD studentship by Fraunhofer UK. 2024-08-15T12:26:35.7609362 2024-06-23T20:02:10.5166937 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering Nils Kolja Wessling 0000-0002-6182-3567 1 Saptarsi Ghosh 0000-0003-1685-6228 2 Benoit Guilhabert 0000-0002-3986-8566 3 Menno Kappers 4 Alexander M. Hinz 5 Miles Toon 6 Rachel A. Oliver 7 Martin D. Dawson 0000-0002-6639-2989 8 Michael J. Strain 0000-0002-9752-3144 9 66874__31126__fb989593c2e74248a94dff69ff431a9b.pdf 66874.VoR.pdf 2024-08-15T12:24:50.2018274 Output 41233245 application/pdf Version of Record true Released under the terms of the Creative Commons Attribution 4.0 License. true eng http://creativecommons.org/licenses/by/4.0/
title	Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
spellingShingle	Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips Saptarsi Ghosh
title_short	Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
title_full	Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
title_fullStr	Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
title_full_unstemmed	Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
title_sort	Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
author_id_str_mv	3e247ecabd6eddd319264d066b0ce959
author_id_fullname_str_mv	3e247ecabd6eddd319264d066b0ce959_***_Saptarsi Ghosh
author	Saptarsi Ghosh
author2	Nils Kolja Wessling Saptarsi Ghosh Benoit Guilhabert Menno Kappers Alexander M. Hinz Miles Toon Rachel A. Oliver Martin D. Dawson Michael J. Strain
format	Journal article
container_title	Optical Materials Express
container_volume	12
container_issue	12
container_start_page	4606
publishDate	2022
institution	Swansea University
issn	2159-3930
doi_str_mv	10.1364/ome.472999
publisher	Optica Publishing Group
college_str	Faculty of Science and Engineering
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hierarchy_top_title	Faculty of Science and Engineering
hierarchy_parent_id	facultyofscienceandengineering
hierarchy_parent_title	Faculty of Science and Engineering
department_str	School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering
document_store_str	1
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description	We demonstrate the back-end integration of optically broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel process flow to fabricate and suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show their subsequent transfer-printing integration. A growth process targeted at producing unbowed epitaxial wafers was combined with optimisation of the etching volume in order to produce flat devices for printing. Lens structures were fabricated with 6 − 11 µm diameter, 2 µm height and root-mean-squared surface roughness below 2 nm. The lenses were printed in a vertically coupled geometry on a single crystalline diamond substrate and with µm-precise placement on a horizontally coupled photonic integrated circuit waveguide facet. Optical performance analysis shows that these lenses could be used to couple to diamond nitrogen vacancy centres at micron scale depths and demonstrates their potential for visible to infrared light-coupling applications.
published_date	2022-12-01T05:30:09Z
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score	11.048756

Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips

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