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Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis
B. F. Spiridon,
M. Toon,
A. Hinz,
Saptarsi Ghosh ,
S. M. Fairclough,
B. J. E. Guilhabert ,
M. J. Strain ,
I. M. Watson,
M. D. Dawson ,
D. J. Wallis,
R. A. Oliver
Optical Materials Express, Volume: 11, Issue: 6, Start page: 1643
Swansea University Author: Saptarsi Ghosh
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DOI (Published version): 10.1364/ome.418728
Abstract
Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis
Published in: | Optical Materials Express |
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ISSN: | 2159-3930 |
Published: |
Optica Publishing Group
2021
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Online Access: |
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URI: | https://cronfa.swan.ac.uk/Record/cronfa66875 |
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College: |
Faculty of Science and Engineering |
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Issue: |
6 |
Start Page: |
1643 |