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Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis

B. F. Spiridon, M. Toon, A. Hinz, Saptarsi Ghosh Orcid Logo, S. M. Fairclough, B. J. E. Guilhabert Orcid Logo, M. J. Strain Orcid Logo, I. M. Watson, M. D. Dawson Orcid Logo, D. J. Wallis, R. A. Oliver

Optical Materials Express, Volume: 11, Issue: 6, Start page: 1643

Swansea University Author: Saptarsi Ghosh Orcid Logo

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DOI (Published version): 10.1364/ome.418728

Published in: Optical Materials Express
ISSN: 2159-3930
Published: Optica Publishing Group 2021
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URI: https://cronfa.swan.ac.uk/Record/cronfa66875
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College: Faculty of Science and Engineering
Issue: 6
Start Page: 1643