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Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching

Richard Palmer Orcid Logo

Swansea University Author: Richard Palmer Orcid Logo

Published: 2012
URI: https://cronfa.swan.ac.uk/Record/cronfa49280
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last_indexed 2019-03-18T20:01:33Z
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spelling 2019-03-18T14:30:28.7770283 v2 49280 2019-03-18 Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article 31 12 2012 2012-12-31 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:30:28.7770283 2019-03-18T14:30:28.7770283 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Richard Palmer 0000-0001-8728-8083 1
title Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching
spellingShingle Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching
Richard Palmer
title_short Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching
title_full Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching
title_fullStr Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching
title_full_unstemmed Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching
title_sort Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Richard Palmer
format Journal article
publishDate 2012
institution Swansea University
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2012-12-31T04:00:09Z
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score 10.999252

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