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Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
Robert D. Allen,
Jedsada Manyam,
Mayandithevar Manickam,
Jon A. Preece,
Richard Palmer 
,
Alex P. Robinson
,
Alex P. Robinson
Swansea University Author:
Richard Palmer
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DOI (Published version): 10.1117/12.846581
Abstract
Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
| Published: |
2010
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49307 |
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| College: |
Faculty of Science and Engineering |
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