Book chapter 337 views
Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
Robert D. Allen,
Jedsada Manyam,
Mayandithevar Manickam,
Jon A. Preece,
Richard Palmer 
,
Alex P. Robinson
,
Alex P. Robinson
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1117/12.846581
Abstract
Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
| Published: |
2010
|
|---|---|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa49307 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| College: |
Faculty of Science and Engineering |
|---|