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Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist

Robert D. Allen, Jedsada Manyam, Mayandithevar Manickam, Jon A. Preece, Richard Palmer Orcid Logo, Alex P. Robinson

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1117/12.846581

Published: 2010
URI: https://cronfa.swan.ac.uk/Record/cronfa49307
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first_indexed 2019-03-18T20:01:37Z
last_indexed 2019-03-18T20:01:37Z
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spelling 2019-03-18T14:31:34.7569898 v2 49307 2019-03-18 Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Book chapter 31 12 2010 2010-12-31 10.1117/12.846581 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:31:34.7569898 2019-03-18T14:31:34.5019516 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Robert D. Allen 1 Jedsada Manyam 2 Mayandithevar Manickam 3 Jon A. Preece 4 Richard Palmer 0000-0001-8728-8083 5 Alex P. Robinson 6
title Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
spellingShingle Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
Richard Palmer
title_short Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
title_full Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
title_fullStr Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
title_full_unstemmed Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
title_sort Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Robert D. Allen
Jedsada Manyam
Mayandithevar Manickam
Jon A. Preece
Richard Palmer
Alex P. Robinson
format Book chapter
publishDate 2010
institution Swansea University
doi_str_mv 10.1117/12.846581
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2010-12-31T04:00:12Z
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score 10.970983

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