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A high resolution water soluble fullerene molecular resist for electron beam lithography

X Chen, R E Palmer, A P G Robinson, Richard Palmer Orcid Logo

Nanotechnology, Volume: 19, Issue: 27, Start page: 275308

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1088/0957-4484/19/27/275308

Published in: Nanotechnology
ISSN: 0957-4484 1361-6528
Published: 2008
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URI: https://cronfa.swan.ac.uk/Record/cronfa49321
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first_indexed 2019-03-18T20:01:39Z
last_indexed 2019-03-18T20:01:39Z
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spelling 2019-03-18T14:32:02.5422301 v2 49321 2019-03-18 A high resolution water soluble fullerene molecular resist for electron beam lithography 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Nanotechnology 19 27 275308 0957-4484 1361-6528 31 12 2008 2008-12-31 10.1088/0957-4484/19/27/275308 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:32:02.5422301 2019-03-18T14:32:02.3407485 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering X Chen 1 R E Palmer 2 A P G Robinson 3 Richard Palmer 0000-0001-8728-8083 4
title A high resolution water soluble fullerene molecular resist for electron beam lithography
spellingShingle A high resolution water soluble fullerene molecular resist for electron beam lithography
Richard Palmer
title_short A high resolution water soluble fullerene molecular resist for electron beam lithography
title_full A high resolution water soluble fullerene molecular resist for electron beam lithography
title_fullStr A high resolution water soluble fullerene molecular resist for electron beam lithography
title_full_unstemmed A high resolution water soluble fullerene molecular resist for electron beam lithography
title_sort A high resolution water soluble fullerene molecular resist for electron beam lithography
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 X Chen
R E Palmer
A P G Robinson
Richard Palmer
format Journal article
container_title Nanotechnology
container_volume 19
container_issue 27
container_start_page 275308
publishDate 2008
institution Swansea University
issn 0957-4484
1361-6528
doi_str_mv 10.1088/0957-4484/19/27/275308
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2008-12-31T04:00:14Z
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