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Chemical Amplification of a Triphenylene Molecular Electron Beam Resist

H. M. Zaid, A. P. G. Robinson, R. E. Palmer, M. Manickam, J. A. Preece, Richard Palmer Orcid Logo

Advanced Functional Materials, Volume: 17, Issue: 14, Pages: 2522 - 2527

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1002/adfm.200600653

Published in: Advanced Functional Materials
ISSN: 1616301X
Published: 2007
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College: Faculty of Science and Engineering
Issue: 14
Start Page: 2522
End Page: 2527