Chemical Amplification of a Triphenylene Molecular Electron Beam Resist

Journal article 876 views

H. M. Zaid, A. P. G. Robinson, R. E. Palmer, M. Manickam, J. A. Preece, Richard Palmer

Advanced Functional Materials, Volume: 17, Issue: 14, Pages: 2522 - 2527

Swansea University Author: Richard Palmer

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DOI (Published version): 10.1002/adfm.200600653

Published in:	Advanced Functional Materials
ISSN:	1616301X
Published:	2007
Online Access:	Check full text
URI:	https://cronfa.swan.ac.uk/Record/cronfa49341

College:	Faculty of Science and Engineering
Issue:	14
Start Page:	2522
End Page:	2527