Journal article 976 views
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
H.M. Zaid,
M. Manickam,
J.A. Preece,
R.E. Palmer,
A.P.G. Robinson,
Richard Palmer 
Microelectronic Engineering, Volume: 85, Issue: 7, Pages: 1540 - 1544
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1016/j.mee.2008.02.009
Abstract
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
| Published in: | Microelectronic Engineering |
|---|---|
| ISSN: | 01679317 |
| Published: |
2008
|
| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49323 |
| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
7 |
| Start Page: |
1540 |
| End Page: |
1544 |