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Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker

H.M. Zaid, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 85, Issue: 7, Pages: 1540 - 1544

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1016/j.mee.2008.02.009

Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2008
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URI: https://cronfa.swan.ac.uk/Record/cronfa49323
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spelling 2019-03-18T14:32:04.6088503 v2 49323 2019-03-18 Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Microelectronic Engineering 85 7 1540 1544 01679317 31 12 2008 2008-12-31 10.1016/j.mee.2008.02.009 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:32:04.6088503 2019-03-18T14:32:04.4065253 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering H.M. Zaid 1 M. Manickam 2 J.A. Preece 3 R.E. Palmer 4 A.P.G. Robinson 5 Richard Palmer 0000-0001-8728-8083 6
title Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
spellingShingle Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
Richard Palmer
title_short Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
title_full Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
title_fullStr Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
title_full_unstemmed Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
title_sort Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 H.M. Zaid
M. Manickam
J.A. Preece
R.E. Palmer
A.P.G. Robinson
Richard Palmer
format Journal article
container_title Microelectronic Engineering
container_volume 85
container_issue 7
container_start_page 1540
publishDate 2008
institution Swansea University
issn 01679317
doi_str_mv 10.1016/j.mee.2008.02.009
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2008-12-31T05:49:24Z
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score 11.088929

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