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Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker

H.M. Zaid, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 85, Issue: 7, Pages: 1540 - 1544

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2008
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College: Faculty of Science and Engineering
Issue: 7
Start Page: 1540
End Page: 1544