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A triphenylene derivative as a novel negative/positive tone resist of 10 nanometer resolution

T. Tada, T. Kanayama, A.P.G. Robinson, R.E. Palmer, M.T. Allen, J.A. Preece, K.D.M. Harris, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 53, Issue: 1-4, Pages: 425 - 428

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2000
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College: Faculty of Science and Engineering
Issue: 1-4
Start Page: 425
End Page: 428