Journal article 571 views
A triphenylene derivative as a novel negative/positive tone resist of 10 nanometer resolution
T. Tada,
T. Kanayama,
A.P.G. Robinson,
R.E. Palmer,
M.T. Allen,
J.A. Preece,
K.D.M. Harris,
Richard Palmer 
Microelectronic Engineering, Volume: 53, Issue: 1-4, Pages: 425 - 428
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1016/s0167-9317(00)00348-8
Abstract
A triphenylene derivative as a novel negative/positive tone resist of 10 nanometer resolution
| Published in: | Microelectronic Engineering |
|---|---|
| ISSN: | 01679317 |
| Published: |
2000
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49442 |
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| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
1-4 |
| Start Page: |
425 |
| End Page: |
428 |