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Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography

Richard Palmer Orcid Logo

Swansea University Author: Richard Palmer Orcid Logo

Published: 1999
URI: https://cronfa.swan.ac.uk/Record/cronfa49472
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spelling 2019-03-18T14:37:13.1796291 v2 49472 2019-03-18 Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Book chapter 31 12 1999 1999-12-31 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:37:13.1796291 2019-03-18T14:37:13.1796291 College of Engineering Engineering Richard Palmer 0000-0001-8728-8083 1
title Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
spellingShingle Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
Richard Palmer
title_short Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
title_full Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
title_fullStr Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
title_full_unstemmed Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
title_sort Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Richard Palmer
format Book chapter
publishDate 1999
institution Swansea University
college_str College of Engineering
hierarchytype
hierarchy_top_id collegeofengineering
hierarchy_top_title College of Engineering
hierarchy_parent_id collegeofengineering
hierarchy_parent_title College of Engineering
department_str Engineering{{{_:::_}}}College of Engineering{{{_:::_}}}Engineering
document_store_str 0
active_str 0
published_date 1999-12-31T04:02:38Z
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